Shenzhen Chuanghuayan Technology Co., Ltd.| HIKROBOT Machine Vision first-level agent in South China
Previous wafer
APPLICATION · Integrated circuits

Previous wafer ·Machine vision solution

Subpixel detection of wafer surface particles, scratches and lithography alignment

Scene overview

OVERVIEW

Previous wafer manufacturing requires extreme cleanliness and accuracy. Machine vision uses sub-pixels to detect particles, scratches and lithography alignment on the wafer surface to ensure process yield and overlay accuracy.

Wafer defect detection Package alignment Lead frame positioning Subpixel measurement BGA ball planting detection
Previous wafer

Core competencies

KEY CAPABILITIES
1

Subpixel detection of particles and scratches on wafer surface

2

Determination of lithography alignment and overlay accuracy

3

High-resolution imaging adapts nanoscale features

4

Non-contact testing ensures cleanliness

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