
Subpixel detection of wafer surface particles, scratches and lithography alignment
Previous wafer manufacturing requires extreme cleanliness and accuracy. Machine vision uses sub-pixels to detect particles, scratches and lithography alignment on the wafer surface to ensure process yield and overlay accuracy.

Subpixel detection of particles and scratches on wafer surface
Determination of lithography alignment and overlay accuracy
High-resolution imaging adapts nanoscale features
Non-contact testing ensures cleanliness
High-speed detection of pin coplanarity, BGA ball placement and character AOI
Lead frame positioning, coating defects and appearance identification
Telecentric Lenses + Custom Light Source enables fluoroscopic Distortion measurement
Complete complex defect determination based on self-developed algorithm Platform
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